Huawei EUV Scanner Patent Suggests Sub-7nm Chips for China

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Huawei has filed a patent application covering an extreme ultraviolet (EUV) lithography scanner, according to UDN. If the company builds such a scanner and achieves decent productivity, uptime, and yields, Chinese chipmakers could produce chips on sub-7nm-class technologies. The only question is when. 

In mid-November, Huawei filed an application with the State Intellectual Property Office for a patent covering an EUV scanner and its key components. The patent application number is 202110524685X, reports MyDrivers

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